Research facilities |
* Multi-zone chemical vapor deposition (CVD) reactors * High-temperature annealing furnaces * In situ ultra-high vacuum (UHV) variable-pressure SEM * In situ variable-temperature heating stage for TEM * UHV CVD system (for thin films and nanowires) * UHV hybrid PVD/CVD system (for the deposition of ultra-thin films) * UHV VT-STM from Omicron (operable at T ~ 1500 K) * In situ optical microscopy set up for electrodeposition & electrochemistry |
Lab location: 1030 Engineering V |
In situ microscopy labs |
Omicron UHV VT-STM |
UHV hybrid PVD/CVD equipped with LEED & AES |